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Name of experiment：performance test of three-dimensional ultrasonic vibration table

Research direction：micro-nano machining

Experiment content：

On the basis of traditional probe nano-engraving processing, processing one-dimensional / two-dimensional ultrasonic vibration can effectively improve the processing efficiency, and reduce probe wear and material accumulation. This experiment aims to test the performance of the designed three-dimensional ultrasonic vibration table to see whether it meets the processing requirements

Purpose of experiment：calibrate the performance of the vibration table

Test equipment：3D ultrasonic vibration table, Doppler laser vibration meter, DAQ acquisition card, ATA-2082 power amplifier, piezoelectric ceramics

Experimental process：

The three-dimensional ultrasonic vibration table has three degrees of freedom in xyz directions, each of which is driven by a separate piezoelectric ceramic plate. It can provide one - dimensional or two - dimensional vibration assistance in vibration assisted machining. In the experimental process, the signal generator sends out the control signal, and the control signal is amplified by ATA-2082 power amplifier, driving the piezoelectric ceramic plate to output the displacement signal, and the signal is collected by Doppler laser vibration meter. One-dimensional vibration at different frequencies and voltages in three directions and two-dimensional vibration at different phase differences between XY and XY were tested.

Result of experiment：

As shown in the figure below, the output displacement increases linearly under different driving voltages. At different driving frequencies, the initial displacement signal remains unchanged, but as the driving frequency gradually approaches the natural frequency of the vibration table, the displacement signal begins to increase. The two-dimensional vibration also shows the change with the phase difference, and shows different shapes. The driving voltage is stable throughout the whole process, the displacement signal is consistent with the expectation, the two channels can output at the same time, and when the ultrasonic frequency is reached, the maximum output voltage can still be stable output.

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